The EMC houses an FEI Helios 660 scanning electron microscope/focussed ion beam (SEM/FIB), an FEI Titan Themis scanning transmission electron microscope (S/TEM), as well as supporting software and staff.

The FEI Titan Themis3 S/TEM is one of the most advanced electron microscopy platform to date, capable of imaging and spectroscopy at the atomic level. Equipped with multiple cameras and detectors, the Titan Themis provides simultaneous information about the position, bonding, and composition of atoms, and can be used to obtain nm-resolution 3D reconstructions and electric field maps.


The Titan is not an entry-level microscope and users requesting training should have significant experience on other instruments. A spring semester class is available to users who want a full theoretical and practical training on the Titan.

Titan Themis Capabilities highlights:

  • Operates in TEM and STEM mode
  • Image+probe Cs correctors for sub-A resolution in both TEM and STEM mode
  • Ultra-bright XFEG gun
  • Voltage tunable 60-300 kV, suitable for beam-sensitive samples
  • Electron monochromator, ZLP FWHM <0.2 eV at all voltages
  • High-speed GIF ERS for large scale spectrum imaging and energy-filtered imaging
  • Dual EELS capabilities
  • High tilt holder for tomography & reconstruction software
  • Cathodoluminescence holder
  • 4K X 4K CMOS camera for fast large area imaging
  • Super-X quad EDS detector for elemental analysis
  • HAADF and triple DF/BF detectors for simultaneous imaging in STEM mode

The FEI Helios NanoLab 660 DualBeam system integrates advanced scanning electron microscope (SEM) and focused ion beam (FIB) technologies with plasma cleaner, Gas Injection System (GIS), and the FEI EasyLift NanoManipulator. The FEI Helios NanoLab 660 DualBeam system makes milling, imaging, analysis, and sample preparation easy and efficient.


Helios 660 FIB/SEM capabilities highlight:

  • Focused ion beam (FIB), 0.5-30 kV for fast cutting and efficient polishing
  • Electron beam tuneable from 20 V- 30 kV
  • Sub-nm resolution SEM from 0.5 kV to 30 kV
  • Plasma cleaner in the chamber
  • Gas Injection System (GIS) for deposition of W, C, Pt
  • FEI EasyLift NanoManipulator
  • SE and 2 BSE detectors
  • In-situ, automated creation of TEM lamella
  • AutoSlice and View 3D reconstructions
  • Precise marching complex micro- and nanoscale devices
  • Circuit editing at nanoscale

Peripherals, supplies, and software. In addition to the Titan and Helios, the EMC is proud to offer the following services:

  • Other instruments:
    • Gatan Solarus H2/O2 plasma cleaner for Titan holders
    • Optical microscopes for sample examining and mounting
  • Software and computing (in B05)
    • Off-line digital micrograph
    • Off-line FEI processing software
    • Titan off-line simulator
    • FEI Avizo 9.0 tomography reconstruction software
    • Hyperspy software
  • Supplies
    • Complementary mounting supplies: silver paint, carbon tape, etc
    • Electron microscopy supplies (grids, mounts, etc)
      • see price list: EMC_SUPPLIES
      • Contact Hua Guo ( to purchase