Helios 660 SEM/FIB

The FEI Helios NanoLab 660 DualBeam system integrates advanced scanning electron microscope (SEM) and focused ion beam (FIB) technologies with plasma cleaner, Gas Injection System (GIS) and the FEI EasyLift NanoManipulator. The FEI Helios NanoLab 660 DualBeam system makes milling, imaging, analysis, and sample preparation easy and efficient.

FIB/SEM capabilities highlight:

  • Focused ion beam (FIB), 0.5-30 kV for fast cutting and efficient polishing
  • Electron beam tuneable from 20 V- 30 kV
  • Sub-nm resolution SEM from 0.5 kV to 30 kV
  • Plasma cleaner in chamber
  • Gas Injection System (GIS) for deposition of W, C, Pt
  • FEI EasyLift NanoManipulator
  • SE and 2 BSE detectors
  • In-situ, automated creation of TEM lamella
  • AutoSlice and View 3D reconstructions
  • Precise marching complex micro- and nanoscale devices
  • Circuit editing at nanoscale


Training Contact:

To begin training, please fill the FULL_APPLICATION_HELIOS and send to Prof. Emilie Ringe (er12@rice.edu), Dr Hua Guo (hua.guo@rice.edu) and Meri Dix (meri.dix@rice.edu)
Faculty in Charge: Emilie Ringe
Staff in chargy: Hua Guo
Rice U Fee: 75$/hour (SEM only, 50$/hour)
Non-Commercial / Academic Fee: 117.50$/hour (SEM  only, 78.25$/hour)
Corporate / Commercial Fee: 225$/hour

The Helios can be booked on FOM

Helios poster_090715_HG_ER_reduced2